A novel selected area laser assisted (SALA) system for crystallization and doping processes in low-temperature poly-Si thin-film transistors

R Ishihara, MP Glazer, Y Raab, P Rusian, M Dorfan, B Lavi, I Leizerson, A Kishnevsky, Y van Aandel, XQ Cao, JW Metselaar, CIM Beenakker, S Stolyarova, Y Nemirovsky

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationIDW/AD '05 - Proceedings of the 12th international display workshops in conjunction with Asia display 2005
EditorsH Mimura
Place of Publications.l.
Publishers.n.
Pages961-964
Number of pages4
Publication statusPublished - 2005
EventIDW/AD '05, 12th International Display Workshops in conjunction with Asia Display 2005, Takamatsu, Japan - s.l.
Duration: 6 Dec 20059 Dec 2005

Publication series

Name
Publishers.n.

Conference

ConferenceIDW/AD '05, 12th International Display Workshops in conjunction with Asia Display 2005, Takamatsu, Japan
Period6/12/059/12/05

Bibliographical note

ISBN onbekend, WPM

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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