A novel semi SOI fabrication process for integrated 3D micromachining

J Wei, T Chu Duc, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

1 Citation (Scopus)
Original languageUndefined/Unknown
Title of host publicationProc. IEEE NEMS 2008
EditorsWC Tang
Place of Publications.l.
PublisherIEEE Society
Pages717-720
Number of pages4
ISBN (Print)978-1-4244-1908
Publication statusPublished - 2008
EventIEEE NEMS 2008, Sanya, China - s.l.
Duration: 6 Jan 20089 Jan 2008

Publication series

Name
PublisherIEEE

Conference

ConferenceIEEE NEMS 2008, Sanya, China
Period6/01/089/01/08

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

Cite this

Wei, J., Chu Duc, T., & Sarro, PM. (2008). A novel semi SOI fabrication process for integrated 3D micromachining. In WC. Tang (Ed.), Proc. IEEE NEMS 2008 (pp. 717-720). IEEE Society.