A novel semi SOI fabrication process for integrated 3D micromachining

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

1 Citation (Scopus)

Original language	Undefined/Unknown
Title of host publication	Proc. IEEE NEMS 2008
Editors	WC Tang
Place of Publication	s.l.
Publisher	IEEE Society
Pages	717-720
Number of pages	4
ISBN (Print)	978-1-4244-1908
Publication status	Published - 2008
Event	IEEE NEMS 2008, Sanya, China - s.l. Duration: 6 Jan 2008 → 9 Jan 2008

Name
Publisher	IEEE

Conference	IEEE NEMS 2008, Sanya, China
Period	6/01/08 → 9/01/08

Keywords

@inproceedings{4fe9a6a267124297aa91d592dd7a2022,

title = "A novel semi SOI fabrication process for integrated 3D micromachining",

keywords = "conference contrib. refereed, Conf.proc. > 3 pag",

author = "J Wei and {Chu Duc}, T and PM Sarro",

year = "2008",

language = "Undefined/Unknown",

isbn = "978-1-4244-1908",

publisher = "IEEE Society",

pages = "717--720",

editor = "WC Tang",

booktitle = "Proc. IEEE NEMS 2008",

note = "IEEE NEMS 2008, Sanya, China ; Conference date: 06-01-2008 Through 09-01-2008",

}

TY - GEN

T1 - A novel semi SOI fabrication process for integrated 3D micromachining

AU - Wei, J

AU - Chu Duc, T

AU - Sarro, PM

PY - 2008

Y1 - 2008

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978-1-4244-1908

SP - 717

EP - 720

BT - Proc. IEEE NEMS 2008

A2 - Tang, WC

PB - IEEE Society

CY - s.l.

T2 - IEEE NEMS 2008, Sanya, China

Y2 - 6 January 2008 through 9 January 2008

ER -