A novel SiC/polymer based bio-inspired surface-micromachining MEMS vibratory gyroscope

Y Chen

Research output: Thesis › Dissertation (external)

Original language	Undefined/Unknown
Qualification	Doctor of Philosophy
Award date	1 Jan 1800
Place of Publication	Delft, The Netherlands
Publisher	Microelectronics, Delft University of Technology
Publication status	Published - 2007

Keywords

@phdthesis{33fff74371c9445e89b6bdfc948fdf02,

title = "A novel SiC/polymer based bio-inspired surface-micromachining MEMS vibratory gyroscope",

keywords = "other public output, Geen BTA classificatie",

author = "Y Chen",

year = "2007",

language = "Undefined/Unknown",

publisher = "Microelectronics, Delft University of Technology",

type = "Dissertation (external)",

}