| Original language | Undefined/Unknown |
|---|---|
| Qualification | Doctor of Philosophy |
| Award date | 31 Dec 1799 |
| Place of Publication | Delft, The Netherlands |
| Publication status | Published - 2007 |
Keywords
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A novel SiC/polymer based bio-inspired surface-micromachining MEMS vibratory gyroscope
Y Chen
Research output: Thesis › Dissertation (external)