A novel soi-mems ¿micro-swing¿ time-accelerometer operating in two time-based transduction modes for high sensitivity and extended range

V Rajaraman, BS Hau, LA Rocha, RA Dias, KAA Makinwa, R Dekker

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)
Original languageEnglish
Title of host publication16th International Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS 2011)
EditorsM Bao, L-S Fan
Place of PublicationBeijing, China
PublisherIEEE Society
Pages2066-2069
Number of pages4
ISBN (Print)978-1-4577-0156-6
DOIs
Publication statusPublished - 2011
EventTransducers 2011 - Beijing, China
Duration: 5 Jun 20119 Jun 2011

Publication series

Name
PublisherIEEE

Conference

ConferenceTransducers 2011
Period5/06/119/06/11

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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