@inproceedings{bde8a1687bbe41d1a754cdf5a6cc9cf2,
title = "A novel technological process for glass-to-glass anodic bonding",
keywords = "ZX Int.klas.verslagjaar < 2002",
author = "M Berthold and L Nicola and PM Sarro and MJ Vellekoop",
year = "1999",
language = "Undefined/Unknown",
publisher = "Institute of Electrical Engineers of Japan",
pages = "1324--1327",
booktitle = "Transducers '99: digest of technical papers. Vol. 2",
note = "10th International Conference on Solid-State Sensors and Actuators, Sendai, Japan ; Conference date: 07-06-1999 Through 10-06-1999",
}