@article{0755338d7d0741b988225a6314adcd66,
title = "A numerical experimental approach for characterizing the elastic properties of thin films: application of nanocantilevers",
keywords = "CWTS 0.75 <= JFIS < 2.00",
author = "RH Poelma and {Sadeghian Marnani}, H and SPM Noijen and JJM Zaal and GQ Zhang",
year = "2011",
doi = "10.1088/0960-1317/21/6/065003",
language = "English",
volume = "21",
pages = "1--11",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "IOP Publishing",
number = "6",
}