A numerical experimental approach for characterizing the elastic properties of thin films: application of nanocantilevers

RH Poelma, H Sadeghian Marnani, SPM Noijen, JJM Zaal, GQ Zhang

Research output: Contribution to journalArticleScientificpeer-review

19 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-11
Number of pages11
JournalJournal of Micromechanics and Microengineering
Volume21
Issue number6
DOIs
Publication statusPublished - 2011

Keywords

  • CWTS 0.75 <= JFIS < 2.00

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