Next-generation motion stages are envisaged to be lightweight to meet stringent demands regarding accuracy and throughput. The lightweight stage design implies flexible dynamical behavior, which is foreseen to be severely excited due to increasing acceleration forces. The aim of this paper is to exploit additional actuators and sensors to explicitly control the flexible dynamic behavior. A systematic weighting filter design procedure is introduced which is tailored to next-generation motion stages. The presented procedure naturally connects to existing robust control techniques. The procedure is applied to an experimental next-generation reticle stage confirming performance enhancement by exploiting additional actuators and sensors beyond traditional performance limitations.
|Publication status||Published - 2022|
|Event||2nd Modeling, Estimation and Control Conference, MECC 2022 - Jersey City, United States|
Duration: 2 Oct 2022 → 5 Oct 2022
- control methods
- Identification for Control
- Mechatronic systems
- Motion Control Systems