A One-step Approach for Centralized Overactuated Motion Control of a Prototype Reticle Stage

Paul Tacx; Tom Oomen

doi:10.1016/j.ifacol.2022.11.202

A One-step Approach for Centralized Overactuated Motion Control of a Prototype Reticle Stage

Paul Tacx, Tom Oomen

Team Jan-Willem van Wingerden

Research output: Contribution to journal › Conference article › Scientific › peer-review

1 Citation (Scopus)

83 Downloads (Pure)

Abstract

Next-generation motion stages are envisaged to be lightweight to meet stringent demands regarding accuracy and throughput. The lightweight stage design implies flexible dynamical behavior, which is foreseen to be severely excited due to increasing acceleration forces. The aim of this paper is to exploit additional actuators and sensors to explicitly control the flexible dynamic behavior. A systematic weighting filter design procedure is introduced which is tailored to next-generation motion stages. The presented procedure naturally connects to existing robust control techniques. The procedure is applied to an experimental next-generation reticle stage confirming performance enhancement by exploiting additional actuators and sensors beyond traditional performance limitations.

Original language	English
Pages (from-to)	308-313
Journal	IFAC-PapersOnline
Volume	55
Issue number	37
DOIs	https://doi.org/10.1016/j.ifacol.2022.11.202
Publication status	Published - 2022
Event	2nd Modeling, Estimation and Control Conference, MECC 2022 - Jersey City, United States Duration: 2 Oct 2022 → 5 Oct 2022

Keywords

control methods
Identification
Identification for Control
Mechatronic systems
Modeling
Motion Control Systems

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10.1016/j.ifacol.2022.11.202

1-s2.0-S2405896322028452-mainFinal published version, 1.08 MBLicence: CC BY-NC-ND

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title = "A One-step Approach for Centralized Overactuated Motion Control of a Prototype Reticle Stage",

abstract = "Next-generation motion stages are envisaged to be lightweight to meet stringent demands regarding accuracy and throughput. The lightweight stage design implies flexible dynamical behavior, which is foreseen to be severely excited due to increasing acceleration forces. The aim of this paper is to exploit additional actuators and sensors to explicitly control the flexible dynamic behavior. A systematic weighting filter design procedure is introduced which is tailored to next-generation motion stages. The presented procedure naturally connects to existing robust control techniques. The procedure is applied to an experimental next-generation reticle stage confirming performance enhancement by exploiting additional actuators and sensors beyond traditional performance limitations.",

keywords = "control methods, Identification, Identification for Control, Mechatronic systems, Modeling, Motion Control Systems",

author = "Paul Tacx and Tom Oomen",

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AU - Tacx, Paul

AU - Oomen, Tom

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AB - Next-generation motion stages are envisaged to be lightweight to meet stringent demands regarding accuracy and throughput. The lightweight stage design implies flexible dynamical behavior, which is foreseen to be severely excited due to increasing acceleration forces. The aim of this paper is to exploit additional actuators and sensors to explicitly control the flexible dynamic behavior. A systematic weighting filter design procedure is introduced which is tailored to next-generation motion stages. The presented procedure naturally connects to existing robust control techniques. The procedure is applied to an experimental next-generation reticle stage confirming performance enhancement by exploiting additional actuators and sensors beyond traditional performance limitations.

KW - control methods

KW - Identification

KW - Identification for Control

KW - Mechatronic systems

KW - Modeling

KW - Motion Control Systems

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DO - 10.1016/j.ifacol.2022.11.202

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SN - 1474-6670

VL - 55

SP - 308

EP - 313

JO - IFAC-PapersOnline

JF - IFAC-PapersOnline

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T2 - 2nd Modeling, Estimation and Control Conference, MECC 2022

Y2 - 2 October 2022 through 5 October 2022

ER -

A One-step Approach for Centralized Overactuated Motion Control of a Prototype Reticle Stage

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