A One-step Approach for Centralized Overactuated Motion Control of a Prototype Reticle Stage

Paul Tacx, Tom Oomen

Research output: Contribution to journalConference articleScientificpeer-review

1 Citation (Scopus)
99 Downloads (Pure)

Abstract

Next-generation motion stages are envisaged to be lightweight to meet stringent demands regarding accuracy and throughput. The lightweight stage design implies flexible dynamical behavior, which is foreseen to be severely excited due to increasing acceleration forces. The aim of this paper is to exploit additional actuators and sensors to explicitly control the flexible dynamic behavior. A systematic weighting filter design procedure is introduced which is tailored to next-generation motion stages. The presented procedure naturally connects to existing robust control techniques. The procedure is applied to an experimental next-generation reticle stage confirming performance enhancement by exploiting additional actuators and sensors beyond traditional performance limitations.

Original languageEnglish
Pages (from-to)308-313
JournalIFAC-PapersOnline
Volume55
Issue number37
DOIs
Publication statusPublished - 2022
Event2nd Modeling, Estimation and Control Conference, MECC 2022 - Jersey City, United States
Duration: 2 Oct 20225 Oct 2022

Keywords

  • control methods
  • Identification
  • Identification for Control
  • Mechatronic systems
  • Modeling
  • Motion Control Systems

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