A photonic microsystem for hydrocarbon gas analysis by mid-infrared absorption spectroscopy

N. Pelin Ayerden, Julien Mandon, Mohammadamir Ghaderi, Frans J.M. Harren, Reinoud F. Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)

Abstract

This paper demonstrates the functional integration of a linear variable optical filter (LVOF) and a gas cell at the wafer level, i.e. a gas-filled LVOF, where the resonator cavity of the filter is also used for storing the gas sample. A mm-level effective optical absorption path length is achieved from a μm-level physical path length, by exploiting multiple reflections from highly reflective Bragg mirrors and the high-order operation of the filter. The wideband spectral response of the device is ensured by using a tapered cavity, where the cavity length changes linearly along the length of the filter. Therefore, combined with a detector array and a light source, the gas-filled LVOF enables wideband operation and long absorption path in a single MEMS device, thus ensuring a highly sensitive on-chip gas absorption microspectrometer.
Original languageEnglish
Title of host publicationMEMS 2017
Subtitle of host publication2017 IEEE 30th International Conference on Micro Electro Mechanical Systems
Place of PublicationPiscataway, NJ
PublisherIEEE
Pages1052-1055
Number of pages4
ISBN (Electronic)978-1-5090-5078-9
Publication statusPublished - 2017
EventMEMS 2017: 30th IEEE International Conference on Micro Electro Mechanical Systems - Rio Las Vegas Hotel and Casino, Las Vegas, NV, United States
Duration: 22 Jan 201726 Jan 2017
Conference number: 30

Conference

ConferenceMEMS 2017
Abbreviated titleIEEE MEMS 2017
CountryUnited States
CityLas Vegas, NV
Period22/01/1726/01/17

Keywords

  • Bragg gratings
  • gas sensors
  • infrared spectroscopy
  • light absorption
  • light reflection
  • micromechanical devices
  • optical filters
  • absorption path
  • effective optical absorption path length
  • functional integration
  • gas-filled LVOF
  • high-order filter operation
  • highly reflective Bragg mirror
  • hydrocarbon gas analysis
  • light source
  • linear variable optical filter
  • midinfrared absorption spectroscopy
  • on-chip gas absorption microspectrometer
  • photonic microsystem
  • physical path length
  • single MEMS device
  • tapered cavity
  • Absorption
  • Cavity resonators
  • Mirrors
  • Optical filters
  • Optical reflection
  • Optical resonators
  • Resonator filters

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