A photonic microsystem for hydrocarbon gas analysis by mid-infrared absorption spectroscopy

N. Pelin Ayerden, Julien Mandon, Mohammadamir Ghaderi, Frans J.M. Harren, Reinoud F. Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

2 Citations (Scopus)


This paper demonstrates the functional integration of a linear variable optical filter (LVOF) and a gas cell at the wafer level, i.e. a gas-filled LVOF, where the resonator cavity of the filter is also used for storing the gas sample. A mm-level effective optical absorption path length is achieved from a μm-level physical path length, by exploiting multiple reflections from highly reflective Bragg mirrors and the high-order operation of the filter. The wideband spectral response of the device is ensured by using a tapered cavity, where the cavity length changes linearly along the length of the filter. Therefore, combined with a detector array and a light source, the gas-filled LVOF enables wideband operation and long absorption path in a single MEMS device, thus ensuring a highly sensitive on-chip gas absorption microspectrometer.
Original languageEnglish
Title of host publicationMEMS 2017
Subtitle of host publication2017 IEEE 30th International Conference on Micro Electro Mechanical Systems
Place of PublicationPiscataway, NJ
Number of pages4
ISBN (Electronic)978-1-5090-5078-9
Publication statusPublished - 2017
EventMEMS 2017: 30th IEEE International Conference on Micro Electro Mechanical Systems - Rio Las Vegas Hotel and Casino, Las Vegas, NV, United States
Duration: 22 Jan 201726 Jan 2017
Conference number: 30


ConferenceMEMS 2017
Abbreviated titleIEEE MEMS 2017
CountryUnited States
CityLas Vegas, NV


  • Bragg gratings
  • gas sensors
  • infrared spectroscopy
  • light absorption
  • light reflection
  • micromechanical devices
  • optical filters
  • absorption path
  • effective optical absorption path length
  • functional integration
  • gas-filled LVOF
  • high-order filter operation
  • highly reflective Bragg mirror
  • hydrocarbon gas analysis
  • light source
  • linear variable optical filter
  • midinfrared absorption spectroscopy
  • on-chip gas absorption microspectrometer
  • photonic microsystem
  • physical path length
  • single MEMS device
  • tapered cavity
  • Absorption
  • Cavity resonators
  • Mirrors
  • Optical filters
  • Optical reflection
  • Optical resonators
  • Resonator filters


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