A photonic microsystem for hydrocarbon gas analysis by mid-infrared absorption spectroscopy

N. Pelin Ayerden; Julien Mandon; Mohammadamir Ghaderi; Frans J.M. Harren; Reinoud F. Wolffenbuttel

A photonic microsystem for hydrocarbon gas analysis by mid-infrared absorption spectroscopy

N. Pelin Ayerden, Julien Mandon, Mohammadamir Ghaderi, Frans J.M. Harren, Reinoud F. Wolffenbuttel

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

2 Citations (Scopus)

Abstract

This paper demonstrates the functional integration of a linear variable optical filter (LVOF) and a gas cell at the wafer level, i.e. a gas-filled LVOF, where the resonator cavity of the filter is also used for storing the gas sample. A mm-level effective optical absorption path length is achieved from a μm-level physical path length, by exploiting multiple reflections from highly reflective Bragg mirrors and the high-order operation of the filter. The wideband spectral response of the device is ensured by using a tapered cavity, where the cavity length changes linearly along the length of the filter. Therefore, combined with a detector array and a light source, the gas-filled LVOF enables wideband operation and long absorption path in a single MEMS device, thus ensuring a highly sensitive on-chip gas absorption microspectrometer.

Original language	English
Title of host publication	MEMS 2017
Subtitle of host publication	2017 IEEE 30th International Conference on Micro Electro Mechanical Systems
Place of Publication	Piscataway, NJ
Publisher	IEEE
Pages	1052-1055
Number of pages	4
ISBN (Electronic)	978-1-5090-5078-9
Publication status	Published - 2017
Event	MEMS 2017: 30th IEEE International Conference on Micro Electro Mechanical Systems - Rio Las Vegas Hotel and Casino, Las Vegas, NV, United States Duration: 22 Jan 2017 → 26 Jan 2017 Conference number: 30

Conference

Conference	MEMS 2017
Abbreviated title	IEEE MEMS 2017
Country/Territory	United States
City	Las Vegas, NV
Period	22/01/17 → 26/01/17

Keywords

Bragg gratings
gas sensors
infrared spectroscopy
light absorption
light reflection
micromechanical devices
optical filters
absorption path
effective optical absorption path length
functional integration
gas-filled LVOF
high-order filter operation
highly reflective Bragg mirror
hydrocarbon gas analysis
light source
linear variable optical filter
midinfrared absorption spectroscopy
on-chip gas absorption microspectrometer
photonic microsystem
physical path length
single MEMS device
tapered cavity
Absorption
Cavity resonators
Mirrors
Optical filters
Optical reflection
Optical resonators
Resonator filters

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http://ieeexplore.ieee.org/document/7863593/

Cite this

@inproceedings{15160afb7d204ac3971625c75e9374aa,

title = "A photonic microsystem for hydrocarbon gas analysis by mid-infrared absorption spectroscopy",

abstract = "This paper demonstrates the functional integration of a linear variable optical filter (LVOF) and a gas cell at the wafer level, i.e. a gas-filled LVOF, where the resonator cavity of the filter is also used for storing the gas sample. A mm-level effective optical absorption path length is achieved from a μm-level physical path length, by exploiting multiple reflections from highly reflective Bragg mirrors and the high-order operation of the filter. The wideband spectral response of the device is ensured by using a tapered cavity, where the cavity length changes linearly along the length of the filter. Therefore, combined with a detector array and a light source, the gas-filled LVOF enables wideband operation and long absorption path in a single MEMS device, thus ensuring a highly sensitive on-chip gas absorption microspectrometer.",

keywords = "Bragg gratings, gas sensors, infrared spectroscopy, light absorption, light reflection, micromechanical devices, optical filters, absorption path, effective optical absorption path length, functional integration, gas-filled LVOF, high-order filter operation, highly reflective Bragg mirror, hydrocarbon gas analysis, light source, linear variable optical filter, midinfrared absorption spectroscopy, on-chip gas absorption microspectrometer, photonic microsystem, physical path length, single MEMS device, tapered cavity, Absorption, Cavity resonators, Mirrors, Optical filters, Optical reflection, Optical resonators, Resonator filters",

author = "Ayerden, {N. Pelin} and Julien Mandon and Mohammadamir Ghaderi and Harren, {Frans J.M.} and Wolffenbuttel, {Reinoud F.}",

year = "2017",

language = "English",

pages = "1052--1055",

booktitle = "MEMS 2017",

publisher = "IEEE",

address = "United States",

note = "MEMS 2017 : 30th IEEE International Conference on Micro Electro Mechanical Systems, IEEE MEMS 2017 ; Conference date: 22-01-2017 Through 26-01-2017",

}

Ayerden, NP, Mandon, J, Ghaderi, M, Harren, FJM & Wolffenbuttel, RF 2017, A photonic microsystem for hydrocarbon gas analysis by mid-infrared absorption spectroscopy. in MEMS 2017: 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems. IEEE, Piscataway, NJ, pp. 1052-1055, MEMS 2017, Las Vegas, NV, United States, 22/01/17. <http://ieeexplore.ieee.org/document/7863593/>

A photonic microsystem for hydrocarbon gas analysis by mid-infrared absorption spectroscopy. / Ayerden, N. Pelin; Mandon, Julien; Ghaderi, Mohammadamir et al.
MEMS 2017: 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems. Piscataway, NJ: IEEE, 2017. p. 1052-1055.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - A photonic microsystem for hydrocarbon gas analysis by mid-infrared absorption spectroscopy

AU - Ayerden, N. Pelin

AU - Mandon, Julien

AU - Ghaderi, Mohammadamir

AU - Harren, Frans J.M.

AU - Wolffenbuttel, Reinoud F.

N1 - Conference code: 30

PY - 2017

Y1 - 2017

N2 - This paper demonstrates the functional integration of a linear variable optical filter (LVOF) and a gas cell at the wafer level, i.e. a gas-filled LVOF, where the resonator cavity of the filter is also used for storing the gas sample. A mm-level effective optical absorption path length is achieved from a μm-level physical path length, by exploiting multiple reflections from highly reflective Bragg mirrors and the high-order operation of the filter. The wideband spectral response of the device is ensured by using a tapered cavity, where the cavity length changes linearly along the length of the filter. Therefore, combined with a detector array and a light source, the gas-filled LVOF enables wideband operation and long absorption path in a single MEMS device, thus ensuring a highly sensitive on-chip gas absorption microspectrometer.

AB - This paper demonstrates the functional integration of a linear variable optical filter (LVOF) and a gas cell at the wafer level, i.e. a gas-filled LVOF, where the resonator cavity of the filter is also used for storing the gas sample. A mm-level effective optical absorption path length is achieved from a μm-level physical path length, by exploiting multiple reflections from highly reflective Bragg mirrors and the high-order operation of the filter. The wideband spectral response of the device is ensured by using a tapered cavity, where the cavity length changes linearly along the length of the filter. Therefore, combined with a detector array and a light source, the gas-filled LVOF enables wideband operation and long absorption path in a single MEMS device, thus ensuring a highly sensitive on-chip gas absorption microspectrometer.

KW - Bragg gratings

KW - gas sensors

KW - infrared spectroscopy

KW - light absorption

KW - light reflection

KW - micromechanical devices

KW - optical filters

KW - absorption path

KW - effective optical absorption path length

KW - functional integration

KW - gas-filled LVOF

KW - high-order filter operation

KW - highly reflective Bragg mirror

KW - hydrocarbon gas analysis

KW - light source

KW - linear variable optical filter

KW - midinfrared absorption spectroscopy

KW - on-chip gas absorption microspectrometer

KW - photonic microsystem

KW - physical path length

KW - single MEMS device

KW - tapered cavity

KW - Absorption

KW - Cavity resonators

KW - Mirrors

KW - Optical filters

KW - Optical reflection

KW - Optical resonators

KW - Resonator filters

M3 - Conference contribution

SP - 1052

EP - 1055

BT - MEMS 2017

PB - IEEE

CY - Piscataway, NJ

T2 - MEMS 2017

Y2 - 22 January 2017 through 26 January 2017

ER -

A photonic microsystem for hydrocarbon gas analysis by mid-infrared absorption spectroscopy

Abstract

Conference

Keywords

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