A physical model to describe the distribution of adhesion strength in MEMS, or why one MEMS device sticks and another 'identical' one does not

WM van Spengen

doi:10.1088/0960-1317/25/12/125012

A physical model to describe the distribution of adhesion strength in MEMS, or why one MEMS device sticks and another 'identical' one does not

WM van Spengen

Micro and Nano Engineering

Research output: Contribution to journal › Article › Scientific › peer-review

13 Citations (Scopus)

Original language	English
Number of pages	12
Journal	Journal of Micromechanics and Microengineering
Volume	25
Issue number	12
DOIs	https://doi.org/10.1088/0960-1317/25/12/125012
Publication status	Published - 2015

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10.1088/0960-1317/25/12/125012

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A physical model to describe the distribution of adhesion strength in MEMS, or why one MEMS device sticks and another 'identical' one does not

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