A physical model to describe the distribution of adhesion strength in MEMS, or why one MEMS device sticks and another 'identical' one does not

WM van Spengen

Research output: Contribution to journalArticleScientificpeer-review

13 Citations (Scopus)
Original languageEnglish
Number of pages12
JournalJournal of Micromechanics and Microengineering
Issue number12
Publication statusPublished - 2015

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