A PMUT based photoacoustic system as a microfluidic concentration detector

Kaustav Roy, Vijayendra Shastri, Akshay Kumar, Jagi Rout, Isha Isha, Kritank Kalyan, Jaya Prakash*, Rudra Pratap*

*Corresponding author for this work

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

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We report on the development of a novel piezo-MEMS-based optofluidic platform to detect the concentration of various species dissolved in a fluid. This platform employs piezoelectric micromachined ultrasound transducers (PMUTs) to work as a photoacoustic receiver, receiving ultrasound from fluid targets present in microfluidic channels while illuminated with a nanosecond pulsed laser. We fabricate both the PMUTs and the microfluidic channels and subsequently use them for the experiment. We also show the capability of PMUTs as a general photoacoustic receiver and demonstrate its signal-to-noise characteristics (31) and its wide fractional bandwidth (73%).

Original languageEnglish
Title of host publicationPhotons Plus Ultrasound
Subtitle of host publicationImaging and Sensing 2022
EditorsAlexander A. Oraevsky, Lihong V. Wang
Number of pages7
ISBN (Electronic)9781510647916
Publication statusPublished - 2022
EventPhotons Plus Ultrasound: Imaging and Sensing 2022 - Virtual, Online
Duration: 20 Feb 202224 Feb 2022

Publication series

NameProgress in Biomedical Optics and Imaging - Proceedings of SPIE
ISSN (Print)1605-7422


ConferencePhotons Plus Ultrasound: Imaging and Sensing 2022
CityVirtual, Online


  • concentration detection
  • microfabrication
  • microfluidic
  • photoacoustic
  • piezo-MEMS
  • PMUTs


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