A practical galvanic etch-stop in Koh using sodium hypochlorite

E Connolly; S Sakarya; PJ French; XH Xia; JJ Kelly

A practical galvanic etch-stop in Koh using sodium hypochlorite

E Connolly, S Sakarya, PJ French, XH Xia, JJ Kelly

Electronic Instrumentation

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

2 Citations (Scopus)

Original language	Undefined/Unknown
Title of host publication	MEMS 2003 IEEE 16th annual international conference on micro electro mechanical systems
Editors	s.n.
Place of Publication	Piscataway
Publisher	IEEE Society
Pages	566-569
Number of pages	4
ISBN (Print)	0-7803-7744-3
Publication status	Published - 2003
Event	IEEE 16th annual international conference on micro electro mechanical systems, Kyoto, Japan - Piscataway Duration: 19 Jan 2003 → 23 Jan 2003

Publication series

Name
Publisher	IEEE

Conference

Conference	IEEE 16th annual international conference on micro electro mechanical systems, Kyoto, Japan
Period	19/01/03 → 23/01/03

Keywords

Conf.proc. > 3 pag

Cite this

@inproceedings{43954db41ca4429a81c6cb96a806ea4d,

title = "A practical galvanic etch-stop in Koh using sodium hypochlorite",

keywords = "Conf.proc. > 3 pag",

author = "E Connolly and S Sakarya and PJ French and XH Xia and JJ Kelly",

year = "2003",

language = "Undefined/Unknown",

isbn = "0-7803-7744-3",

publisher = "IEEE Society",

pages = "566--569",

editor = "s.n.",

booktitle = "MEMS 2003 IEEE 16th annual international conference on micro electro mechanical systems",

note = "IEEE 16th annual international conference on micro electro mechanical systems, Kyoto, Japan ; Conference date: 19-01-2003 Through 23-01-2003",

}

Connolly, E, Sakarya, S, French, PJ, Xia, XH & Kelly, JJ 2003, A practical galvanic etch-stop in Koh using sodium hypochlorite. in s.n. (ed.), MEMS 2003 IEEE 16th annual international conference on micro electro mechanical systems. IEEE Society, Piscataway, pp. 566-569, IEEE 16th annual international conference on micro electro mechanical systems, Kyoto, Japan, 19/01/03.

A practical galvanic etch-stop in Koh using sodium hypochlorite. / Connolly, E; Sakarya, S; French, PJ et al.
MEMS 2003 IEEE 16th annual international conference on micro electro mechanical systems. ed. / s.n. Piscataway: IEEE Society, 2003. p. 566-569.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - A practical galvanic etch-stop in Koh using sodium hypochlorite

AU - Connolly, E

AU - Sakarya, S

AU - French, PJ

AU - Xia, XH

AU - Kelly, JJ

PY - 2003

Y1 - 2003

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 0-7803-7744-3

SP - 566

EP - 569

BT - MEMS 2003 IEEE 16th annual international conference on micro electro mechanical systems

A2 - s.n., null

PB - IEEE Society

CY - Piscataway

T2 - IEEE 16th annual international conference on micro electro mechanical systems, Kyoto, Japan

Y2 - 19 January 2003 through 23 January 2003

ER -