@inproceedings{de8f9c3e88ba48669f32b39c95cc8ebe,
title = "A quantitative evaluation of pattern transfer across (111) surfaces in a (100) silicon wafer by contact masking and over-exposure",
keywords = "Conf.proc. > 3 pag",
author = "WJ Venstra and M Laros and JW Spronck and PM Sarro and J. Eijk",
year = "2004",
language = "Undefined/Unknown",
isbn = "88-7621-282-5",
publisher = "University of Rome",
pages = "313--316",
editor = "Palombie",
booktitle = "Eurosensors XVIII",
note = "null ; Conference date: 13-09-2004 Through 15-09-2004",
}