A robust implementation of stress governing equations for next generation process simulators

S Mijalkovic; W Crans

A robust implementation of stress governing equations for next generation process simulators

S Mijalkovic, W Crans

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings
Editors	D Zhang, FE Ernst, O de Saint Leger
Place of Publication	Paris
Publisher	Europia Productions
Pages	303-307
Number of pages	5
ISBN (Print)	0-7803-9806-8
Publication status	Published - 2001
Event	2nd International Conference on Benefiting from Thermal and Mechanical Simulation in (Micro)-Electronics, Paris - Paris Duration: 9 Apr 2001 → 11 Apr 2001

Publication series

Name
Publisher	Europia Productions

Conference

Conference	2nd International Conference on Benefiting from Thermal and Mechanical Simulation in (Micro)-Electronics, Paris
Period	9/04/01 → 11/04/01

Keywords

ZX Int.klas.verslagjaar < 2002

Cite this

@inproceedings{95baa4119b3940cfb222840a9626fd1b,

title = "A robust implementation of stress governing equations for next generation process simulators",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "S Mijalkovic and W Crans",

year = "2001",

language = "Undefined/Unknown",

isbn = "0-7803-9806-8",

publisher = "Europia Productions",

pages = "303--307",

editor = "{D Zhang} and {FE Ernst} and {O de Saint Leger}",

booktitle = "Proceedings",

address = "France",

note = "2nd International Conference on Benefiting from Thermal and Mechanical Simulation in (Micro)-Electronics, Paris ; Conference date: 09-04-2001 Through 11-04-2001",

}

TY - GEN

T1 - A robust implementation of stress governing equations for next generation process simulators

AU - Mijalkovic, S

AU - Crans, W

PY - 2001

Y1 - 2001

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 0-7803-9806-8

SP - 303

EP - 307

BT - Proceedings

A2 - D Zhang, null

A2 - FE Ernst, null

A2 - O de Saint Leger, null

PB - Europia Productions

CY - Paris

T2 - 2nd International Conference on Benefiting from Thermal and Mechanical Simulation in (Micro)-Electronics, Paris

Y2 - 9 April 2001 through 11 April 2001

ER -