A robust implementation of stress governing equations in semiconductor process simulation

S Mijalkovic

A robust implementation of stress governing equations in semiconductor process simulation

S Mijalkovic

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	SAFE99: proceedings. ProRISC99 proceedings. [CD-ROM]
Place of Publication	Utrecht
Publisher	STW Technology Foundation
Pages	701-707
Number of pages	7
ISBN (Print)	90-73461-18-9
Publication status	Published - 1999
Event	2nd Annual Workshop on Semiconductor Advances for Future Electronics. IEEE 10th Annual Workshop on Circuits, Systems and Signal Processing, Mierlo - Utrecht Duration: 24 Nov 1999 → 25 Nov 1999

Publication series

Name
Publisher	STW technology foundation

Conference

Conference	2nd Annual Workshop on Semiconductor Advances for Future Electronics. IEEE 10th Annual Workshop on Circuits, Systems and Signal Processing, Mierlo
Period	24/11/99 → 25/11/99

Keywords

ZX Int.klas.verslagjaar < 2002

Cite this

@inproceedings{28da8f65d7824b7e96a1c276aa6bfb40,

title = "A robust implementation of stress governing equations in semiconductor process simulation",

keywords = "ZX Int.klas.verslagjaar < 2002",

author = "S Mijalkovic",

year = "1999",

language = "Undefined/Unknown",

isbn = "90-73461-18-9",

publisher = "STW Technology Foundation",

pages = "701--707",

booktitle = "SAFE99: proceedings. ProRISC99 proceedings. [CD-ROM]",

note = "2nd Annual Workshop on Semiconductor Advances for Future Electronics. IEEE 10th Annual Workshop on Circuits, Systems and Signal Processing, Mierlo ; Conference date: 24-11-1999 Through 25-11-1999",

}

Mijalkovic, S 1999, A robust implementation of stress governing equations in semiconductor process simulation. in SAFE99: proceedings. ProRISC99 proceedings. [CD-ROM]. STW Technology Foundation, Utrecht, pp. 701-707, 2nd Annual Workshop on Semiconductor Advances for Future Electronics. IEEE 10th Annual Workshop on Circuits, Systems and Signal Processing, Mierlo, 24/11/99.

TY - GEN

T1 - A robust implementation of stress governing equations in semiconductor process simulation

AU - Mijalkovic, S

PY - 1999

Y1 - 1999

KW - ZX Int.klas.verslagjaar < 2002

M3 - Conference contribution

SN - 90-73461-18-9

SP - 701

EP - 707

BT - SAFE99: proceedings. ProRISC99 proceedings. [CD-ROM]

PB - STW Technology Foundation

CY - Utrecht

T2 - 2nd Annual Workshop on Semiconductor Advances for Future Electronics. IEEE 10th Annual Workshop on Circuits, Systems and Signal Processing, Mierlo

Y2 - 24 November 1999 through 25 November 1999

ER -