A self-aligned vertical HBT for thin SOI SiGeC BiCMOS

G Avenier, T Schwartzmann, P Chevalier, B Vandelle, L Rubaldo, D Dutartre, L Boissonnet, F Saguin, R Pantel, S Fregonese, C Maneux, T Zimmer, A Chantre

    Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

    33 Citations (Scopus)
    Original languageUndefined/Unknown
    Title of host publicationIEEE BCTM 2005
    Editors s.n.
    Place of PublicationSanta Barbara, CA.
    PublisherIEEE Society
    Pages128-131
    Number of pages4
    Publication statusPublished - 2005

    Publication series

    Name
    PublisherIEEE

    Keywords

    • Elektrotechniek
    • Techniek
    • conference contrib. refereed
    • Geen BTA classificatie

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