A sensitive optical micro-machined ultrasound sensor (OMUS) based on a silicon photonic ring resonator on an acoustical membrane

SM Leinders, WJ Westerveld, J Pozo, PLMJ Neer, B Snyder, P O'Brien, HP Urbach, N de Jong, MD Verweij

Research output: Contribution to journalArticleScientificpeer-review

46 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-9
Number of pages9
JournalScientific Reports
Volume5
DOIs
Publication statusPublished - 2015

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