A silicon carbide MEMS microhotplate for nanomaterial characterization in TEM

B Morana, F Santagata, L Mele, M Mihailovic, G Pandraud, JF Creemer, PM Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

18 Citations (Scopus)
Original languageEnglish
Title of host publication24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011)
EditorsK Böhringer, L Lin
Place of PublicationPiscataway, NJ, USA
PublisherIEEE Society
Pages380-383
Number of pages4
ISBN (Print)978-1-4244-9634-1
DOIs
Publication statusPublished - 2011
Event24th IEEE International Conference MEMS 2011 - Piscataway, NJ, USA
Duration: 23 Jan 201127 Jan 2011

Publication series

Name
PublisherIEEE

Conference

Conference24th IEEE International Conference MEMS 2011
Period23/01/1127/01/11

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

Cite this