@article{8cc71f38ef954b31930f5a8c14e7e732,
title = "A silicon MEMS structure for characterization of femto-farad-level capacitive sensors with lock-in architecture",
keywords = "Elektrotechniek, Techniek, academic journal papers, CWTS 0.75 <= JFIS < 2.00",
author = "J Wei and C Yue and ZL Chen and ZW Liu and PM Sarro",
year = "2010",
doi = "10.1088/0960-1317/20/6/064019",
language = "English",
volume = "20",
pages = "1--8",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
publisher = "IOP Publishing",
number = "6",
}