A silicon MEMS structure for characterization of femto-farad-level capacitive sensors with lock-in architecture

J Wei, C Yue, ZL Chen, ZW Liu, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

8 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-8
Number of pages8
JournalJournal of Micromechanics and Microengineering
Volume20
Issue number6
DOIs
Publication statusPublished - 2010

Keywords

  • Elektrotechniek
  • Techniek
  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

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