Original language | English |
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Awarding Institution |
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Supervisors/Advisors |
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Award date | 10 Jan 2019 |
Print ISBNs | 978-94-028-1350-0 |
DOIs | |
Publication status | Published - 2019 |
Keywords
- MOEMS
- system integration
- OCT imaging
- electrothermal actuators
- Al-SiOx bimorph beams
- Si microlenses
- Si photonics