A single-chip micro-opto-electro-mechanical system for optical coherence tomography imaging

Research output: ThesisDissertation (TU Delft)

3 Downloads (Pure)
Original languageEnglish
Awarding Institution
  • Delft University of Technology
Supervisors/Advisors
  • Sarro, P.M., Supervisor
Award date10 Jan 2019
Print ISBNs978-94-028-1350-0
DOIs
Publication statusPublished - 2019

Keywords

  • MOEMS
  • system integration
  • OCT imaging
  • electrothermal actuators
  • Al-SiOx bimorph beams
  • Si microlenses
  • Si photonics

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