@phdthesis{84fa3be632e848f8a732deb4445b1b23,
title = "A single-chip micro-opto-electro-mechanical system for optical coherence tomography imaging",
keywords = "MOEMS, system integration, OCT imaging, electrothermal actuators, Al-SiOx bimorph beams, Si microlenses, Si photonics",
author = "Aleksandar Jovic",
year = "2019",
doi = "10.4233/uuid:84fa3be6-32e8-48f8-a732-deb4445b1b23",
language = "English",
isbn = "978-94-028-1350-0",
type = "Dissertation (TU Delft)",
school = "Delft University of Technology",
}