A single-chip micro-opto-electro-mechanical system for optical coherence tomography imaging

Research output: Thesis › Dissertation (TU Delft)

33 Downloads (Pure)

Original language	English
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Sarro, P.M., Supervisor
Award date	10 Jan 2019
Print ISBNs	978-94-028-1350-0
DOIs	https://doi.org/10.4233/uuid:84fa3be6-32e8-48f8-a732-deb4445b1b23
Publication status	Published - 2019

Keywords

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title = "A single-chip micro-opto-electro-mechanical system for optical coherence tomography imaging",

keywords = "MOEMS, system integration, OCT imaging, electrothermal actuators, Al-SiOx bimorph beams, Si microlenses, Si photonics",

author = "Aleksandar Jovic",

year = "2019",

doi = "10.4233/uuid:84fa3be6-32e8-48f8-a732-deb4445b1b23",

language = "English",

isbn = "978-94-028-1350-0",

school = "Delft University of Technology",

}

TY - THES

T1 - A single-chip micro-opto-electro-mechanical system for optical coherence tomography imaging

AU - Jovic, Aleksandar

PY - 2019

Y1 - 2019

KW - MOEMS

KW - system integration

KW - OCT imaging

KW - electrothermal actuators

KW - Al-SiOx bimorph beams

KW - Si microlenses

KW - Si photonics

U2 - 10.4233/uuid:84fa3be6-32e8-48f8-a732-deb4445b1b23

DO - 10.4233/uuid:84fa3be6-32e8-48f8-a732-deb4445b1b23

M3 - Dissertation (TU Delft)

SN - 978-94-028-1350-0

ER -