@inproceedings{5fcd9847d4f644a38c460fb0593c76f7,
title = "A single-mask thermal displacement sensor in MEMS",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "RP Hogervorst and B Krijnen and DM Brouwer and JBC Engelen and U Staufer",
year = "2010",
language = "English",
isbn = "978-0-9553082-8-4",
publisher = "EUSPEN",
pages = "47--50",
editor = "H. Spaan and P. Shore and {van Brussel}, H. and T. Burke",
booktitle = "Proceedings of the 10th International Conference of Euspen",
note = "10th Euspen International Conference, Delft ; Conference date: 31-05-2010 Through 04-06-2010",
}