A single-mask thermal displacement sensor in MEMS

RP Hogervorst, B Krijnen, DM Brouwer, JBC Engelen, U Staufer

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

3 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings of the 10th International Conference of Euspen
EditorsH. Spaan, P. Shore, H. van Brussel, T. Burke
Place of PublicationBedford
PublisherEUSPEN
Pages47-50
Number of pages4
ISBN (Print)978-0-9553082-8-4
Publication statusPublished - 2010
Event10th Euspen International Conference, Delft - Bedford
Duration: 31 May 20104 Jun 2010

Publication series

Name
PublisherEuspen

Conference

Conference10th Euspen International Conference, Delft
Period31/05/104/06/10

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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