A study of cross-bridge kelvin resistor structures for reliable measurement of low contact resistances

N Stavitski, JH Klootwijk, HW van Zeijl, AY Kovalging, RAM Wolters

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

7 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publicationProceedings of the 21st International Conference on Microelectronic Test structures (ICMTS)
Editors s.n
Place of PublicationEdinburgh, Schotland
PublisherIEEE Society
Pages199-204
Number of pages6
ISBN (Print)978-1-4244-1801-5
Publication statusPublished - 2008
Event2008 IEEE International Conference on Microelectronic Test structures (ICMTS), Edinburgh, Schotland - Edinburgh, Schotland
Duration: 24 Mar 200827 Mar 2008

Publication series

Name
PublisherIEEE

Conference

Conference2008 IEEE International Conference on Microelectronic Test structures (ICMTS), Edinburgh, Schotland
Period24/03/0827/03/08

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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