A study on CMP effect on the quality of thin silicon film characterized by micro czochraslki process with excimer-laser irradiation

J Derakhshandeh Kheljani; MR Tajari Mofrad; R Ishihara; J van der Cingel; CIM Beenakker

A study on CMP effect on the quality of thin silicon film characterized by micro czochraslki process with excimer-laser irradiation

J Derakhshandeh Kheljani, MR Tajari Mofrad, R Ishihara, J van der Cingel, CIM Beenakker

Electronic Components, Technology and Materials

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	The proceeding of the 4th international TFT conference
Editors	J Jang
Place of Publication	Seoul, Korea
Publisher	s.n.
Pages	327-330
Number of pages	4
Publication status	Published - 2008
Event	ITC 2008, Seoul, Korea - Seoul, Korea Duration: 24 Jan 2008 → 25 Jan 2008

Publication series

Name
Publisher	s.n.

Conference

Conference	ITC 2008, Seoul, Korea
Period	24/01/08 → 25/01/08

Keywords

Elektrotechniek
Techniek
conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{e8768aaf4f124402834a4f6dd53c49b7,

title = "A study on CMP effect on the quality of thin silicon film characterized by micro czochraslki process with excimer-laser irradiation",

keywords = "Elektrotechniek, Techniek, conference contrib. refereed, Conf.proc. > 3 pag",

author = "{Derakhshandeh Kheljani}, J and {Tajari Mofrad}, MR and R Ishihara and {van der Cingel}, J and CIM Beenakker",

year = "2008",

language = "Undefined/Unknown",

publisher = "s.n.",

pages = "327--330",

editor = "J Jang",

booktitle = "The proceeding of the 4th international TFT conference",

note = "ITC 2008, Seoul, Korea ; Conference date: 24-01-2008 Through 25-01-2008",

}

Derakhshandeh Kheljani, J, Tajari Mofrad, MR, Ishihara, R , van der Cingel, J & Beenakker, CIM 2008, A study on CMP effect on the quality of thin silicon film characterized by micro czochraslki process with excimer-laser irradiation. in J Jang (ed.), The proceeding of the 4th international TFT conference. s.n., Seoul, Korea, pp. 327-330, ITC 2008, Seoul, Korea, 24/01/08.

A study on CMP effect on the quality of thin silicon film characterized by micro czochraslki process with excimer-laser irradiation. / Derakhshandeh Kheljani, J; Tajari Mofrad, MR; Ishihara, R et al.
The proceeding of the 4th international TFT conference. ed. / J Jang. Seoul, Korea: s.n., 2008. p. 327-330.

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

TY - GEN

T1 - A study on CMP effect on the quality of thin silicon film characterized by micro czochraslki process with excimer-laser irradiation

AU - Derakhshandeh Kheljani, J

AU - Tajari Mofrad, MR

AU - Ishihara, R

AU - van der Cingel, J

AU - Beenakker, CIM

PY - 2008

Y1 - 2008

KW - Elektrotechniek

KW - Techniek

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 327

EP - 330

BT - The proceeding of the 4th international TFT conference

A2 - Jang, J

PB - s.n.

CY - Seoul, Korea

T2 - ITC 2008, Seoul, Korea

Y2 - 24 January 2008 through 25 January 2008

ER -