A sub-surface metallization post-process IC module for RF technology

TK Ng, PN Pham, B Rejaei Salmassi, PM Sarro, JN Burghartz

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationBCTM 2000 proceedings
Place of PublicationPiscataway
PublisherIEEE Society
Pages195-198
Number of pages4
ISBN (Print)0-7803-6384-1
Publication statusPublished - 2000
EventBipolar/BiCMOS Circuits and Technology Meeting 2000, Minneapolis - Piscataway
Duration: 24 Sep 200026 Sep 2000

Publication series

Name
PublisherIEEE

Conference

ConferenceBipolar/BiCMOS Circuits and Technology Meeting 2000, Minneapolis
Period24/09/0026/09/00

Keywords

  • ZX Int.klas.verslagjaar < 2002

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