A surface micromachined accelerometer working in the pull-in operation mode

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings SeSens 2002
Place of PublicationUtrecht
PublisherSTW Stichting voor de Technische Wetenschappen
Pages700-703
Number of pages4
Publication statusPublished - 2002
EventSeSens 2002 SAFE2002 ProRISC 2002 Veldhoven, the Netherlands - Utrecht
Duration: 29 Nov 200229 Nov 2002

Publication series

Name
PublisherSTW Stichting voor de Technische Wetenschappen

Conference

ConferenceSeSens 2002 SAFE2002 ProRISC 2002 Veldhoven, the Netherlands
Period29/11/0229/11/02

Keywords

  • Elektrotechniek
  • Techniek
  • Conf.proc. > 3 pag

Cite this

Yang, H., Pakula, L., & French, PJ. (2002). A surface micromachined accelerometer working in the pull-in operation mode. In Proceedings SeSens 2002 (pp. 700-703). STW Stichting voor de Technische Wetenschappen.