A surface micromachined accelerometer working in the pull-in operation mode

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings SeSens 2002
Place of Publication	Utrecht
Publisher	STW Stichting voor de Technische Wetenschappen
Pages	700-703
Number of pages	4
Publication status	Published - 2002
Event	SeSens 2002 SAFE2002 ProRISC 2002 Veldhoven, the Netherlands - Utrecht Duration: 29 Nov 2002 → 29 Nov 2002

Name
Publisher	STW Stichting voor de Technische Wetenschappen

Conference	SeSens 2002 SAFE2002 ProRISC 2002 Veldhoven, the Netherlands
Period	29/11/02 → 29/11/02

Keywords

@inproceedings{b2e8c4f2e2724dbea61446e1685bc126,

title = "A surface micromachined accelerometer working in the pull-in operation mode",

keywords = "Elektrotechniek, Techniek, Conf.proc. > 3 pag",

author = "H Yang and L Pakula and PJ French",

year = "2002",

language = "Undefined/Unknown",

publisher = "STW Stichting voor de Technische Wetenschappen",

pages = "700--703",

booktitle = "Proceedings SeSens 2002",

note = "SeSens 2002 SAFE2002 ProRISC 2002 Veldhoven, the Netherlands ; Conference date: 29-11-2002 Through 29-11-2002",

}

TY - GEN

T1 - A surface micromachined accelerometer working in the pull-in operation mode

AU - Yang, H

AU - Pakula, L

AU - French, PJ

PY - 2002

Y1 - 2002

KW - Elektrotechniek

KW - Techniek

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SP - 700

EP - 703

BT - Proceedings SeSens 2002

PB - STW Stichting voor de Technische Wetenschappen

CY - Utrecht

T2 - SeSens 2002 SAFE2002 ProRISC 2002 Veldhoven, the Netherlands

Y2 - 29 November 2002 through 29 November 2002

ER -