A surface micromachined thermopile detector array with an interference-based absorber

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	English
Pages (from-to)	1-8
Number of pages	8
Journal	Journal of Micromechanics and Microengineering
Volume	21
Issue number	7
DOIs	https://doi.org/10.1088/0960-1317/21/7/074009
Publication status	Published - 2011

Keywords

@article{ebbd62c8d29e46af8874465c02ecb5d3,

title = "A surface micromachined thermopile detector array with an interference-based absorber",

keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "HW Wu and A Emadi and PM Sarro and {de Graaf}, G and RF Wolffenbuttel",

year = "2011",

doi = "10.1088/0960-1317/21/7/074009",

language = "English",

volume = "21",

pages = "1--8",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

number = "7",

}

TY - JOUR

T1 - A surface micromachined thermopile detector array with an interference-based absorber

AU - Wu, HW

AU - Emadi, A

AU - Sarro, PM

AU - de Graaf, G

AU - Wolffenbuttel, RF

PY - 2011

Y1 - 2011

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

U2 - 10.1088/0960-1317/21/7/074009

DO - 10.1088/0960-1317/21/7/074009

M3 - Article

SN - 0960-1317

VL - 21

SP - 1

EP - 8

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 7

ER -