A surface micromachined thermopile detector array with an interference-based absorber

Research output: Contribution to journalArticleScientificpeer-review

7 Citations (Scopus)
Original languageEnglish
Pages (from-to)1-8
Number of pages8
JournalJournal of Micromechanics and Microengineering
Volume21
Issue number7
DOIs
Publication statusPublished - 2011

Keywords

  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

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