Original language | English |
---|---|
IPC | H01L, G01R, G01N |
Priority date | 27/09/19 |
Publication status | Published - 2021 |
Bibliographical note
Patent: OCT-19-040Applicant: TU Delft
O.C. Akgün (Inventor)
Research output: Patent
Original language | English |
---|---|
IPC | H01L, G01R, G01N |
Priority date | 27/09/19 |
Publication status | Published - 2021 |