| Original language | English |
|---|---|
| IPC | H01L, G01R, G01N |
| Priority date | 27/09/19 |
| Publication status | Published - 2021 |
Bibliographical note
Patent: OCT-19-040Applicant: TU Delft
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O.C. Akgün (Inventor)
Research output: Patent
| Original language | English |
|---|---|
| IPC | H01L, G01R, G01N |
| Priority date | 27/09/19 |
| Publication status | Published - 2021 |