A thermopile detector array with scaled TE elements for use in an integrated IR microspectrometer

HW Wu, S Grabarnik, A Emadi, G de Graaf, RF Wolffenbuttel

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Journal	Journal of Micromechanics and Microengineering
Volume	18
Issue number	6
Publication status	Published - 2008

Keywords

@article{894a72ab7a6a46e49bd0df1067dbbe36,

title = "A thermopile detector array with scaled TE elements for use in an integrated IR microspectrometer",

keywords = "professional journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "HW Wu and S Grabarnik and A Emadi and {de Graaf}, G and RF Wolffenbuttel",

year = "2008",

language = "Undefined/Unknown",

volume = "18",

journal = "Journal of Micromechanics and Microengineering",

issn = "0960-1317",

publisher = "IOP Publishing",

number = "6",

}

TY - JOUR

T1 - A thermopile detector array with scaled TE elements for use in an integrated IR microspectrometer

AU - Wu, HW

AU - Grabarnik, S

AU - Emadi, A

AU - de Graaf, G

AU - Wolffenbuttel, RF

PY - 2008

Y1 - 2008

KW - professional journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0960-1317

VL - 18

JO - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

IS - 6

ER -