@inproceedings{91ad6badf460463f8842d2eb0219b976,
title = "A thin-SOI micromachined quasi-digital accelerometer",
keywords = "conference contrib. refereed, Conf.proc. > 3 pag",
author = "L Pakula and V Rajaraman and PJ French",
year = "2008",
language = "Undefined/Unknown",
isbn = "978-3-00-025217-4",
publisher = "Eurosensors",
pages = "201--205",
editor = "s.n.",
booktitle = "Proceedings Eurosensors XXII",
note = "EurosensorsXXII,dresden,germany ; Conference date: 07-09-2008 Through 10-09-2008",
}