A thin-SOI micromachined quasi-digital accelerometer

L Pakula, V Rajaraman, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationProceedings Eurosensors XXII
Editors s.n.
Place of Publicationdresde,germany
PublisherEurosensors
Pages201-205
Number of pages5
ISBN (Print)978-3-00-025217-4
Publication statusPublished - 2008
EventEurosensorsXXII,dresden,germany - dresde,germany
Duration: 7 Sep 200810 Sep 2008

Publication series

Name
PublisherEurosensors

Conference

ConferenceEurosensorsXXII,dresden,germany
Period7/09/0810/09/08

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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