A time/resistor-referenced capacitive sensor interface for displacement measurement in the sub-nanometer range

R Yang, S Nihtianov

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

10 Citations (Scopus)
Original languageEnglish
Title of host publicationProceedings 22nd IEEE International Symposium on Industrial Electronics (ISIE 2013)
EditorsRC Luo
Place of PublicationPiscataway, NJ, USA
PublisherIEEE
Pages1-5
Number of pages5
ISBN (Print)978-1-4673-5194-2
DOIs
Publication statusPublished - 2013
EventISIE 2013, Taipei, Taiwan - Piscataway, NJ, USA
Duration: 28 May 201331 May 2013

Publication series

Name
PublisherIEEE

Conference

ConferenceISIE 2013, Taipei, Taiwan
Period28/05/1331/05/13

Bibliographical note

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