A transfer-free wafer-scale CVD graphene fabrication process for MEMS/NEMS sensors

Sten Vollebregt, B. Alfano, F. Ricciardella, A.J.M. Giesbers, Yelena Grachova, Henk van Zeijl, T Polichetti, Lina Sarro

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

8 Citations (Scopus)

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Physics & Astronomy