@article{cad1eab674764428be1216daf2069e00,
title = "A tube-shaped buried Pirani gauge for low detection limit with small footprint",
keywords = "Elektrotechniek, Techniek, academic journal papers, CWTS 0.75 <= JFIS < 2.00",
author = "F Santagata and JF Creemer and E Iervolino and L Mele and {van Herwaarden}, AW and PM Sarro",
year = "2011",
doi = "10.1109/JMEMS.2011.2127457",
language = "English",
volume = "20",
pages = "676--684",
journal = "IEEE Journal of Microelectromechanical Systems",
issn = "1057-7157",
publisher = "Institute of Electrical and Electronics Engineers (IEEE)",
number = "3",
}