A tube-shaped buried Pirani gauge for low detection limit with small footprint

F Santagata, JF Creemer, E Iervolino, L Mele, AW van Herwaarden, PM Sarro

Research output: Contribution to journalArticleScientificpeer-review

22 Citations (Scopus)
Original languageEnglish
Pages (from-to)676-684
Number of pages9
JournalIEEE Journal of Microelectromechanical Systems
Volume20
Issue number3
DOIs
Publication statusPublished - 2011

Keywords

  • Elektrotechniek
  • Techniek
  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

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