Quantum dots fabricated using methods compatible with semiconductor manufacturing are promising for quantum information processing. In order to fully utilize the potential of this platform, scaling quantum dot arrays along two dimensions is a key step. Here, we demonstrate a two-dimensional quantum dot array where each quantum dot is tuned to single-charge occupancy, verified by simultaneous measurements using two integrated radio frequency charge sensors. We achieve this by using planar germanium quantum dots with low disorder and a small effective mass, allowing the incorporation of dedicated barrier gates to control the coupling of the quantum dots. We measure the hole charge filling spectrum and show that we can tune single-hole quantum dots from isolated quantum dots to strongly exchange coupled quantum dots. These results motivate the use of planar germanium quantum dots as building blocks for quantum simulation and computation.
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van Riggelen, F. (Creator), Hendrickx, N. (Creator), Lawrie, W. I. L. (Creator), Russ, M. F. (Creator), Sammak, A. (Creator), Scappucci, G. (Creator) & Veldhorst, M. (Creator), TU Delft - 4TU.ResearchData, 12 Jan 2021