A versatile CMOS compatible PECVD silicon carbide MEMS technology

L Pakula, V Rajaraman, PJ French

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientificpeer-review

Original languageUndefined/Unknown
Title of host publicationA versatile CMOS compatible PECVD silicon carbide MEMS technology
Editors s.n.
Place of PublicationChennai, India
PublisherICMEMS
Pages0-4
Number of pages5
ISBN (Print)978-81-908468-0-6
Publication statusPublished - 2009
EventICMEMS 2009 - Chennai, India
Duration: 3 Jan 20095 Jan 2009

Publication series

Name
PublisherICMEMS

Conference

ConferenceICMEMS 2009
Period3/01/095/01/09

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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