In this paper we present, for the first time, the successful monolithic wafer-scale integration of CVD graphene with CMOS logic for highly miniaturized smart sensing structures with on-chip readout electronics. The use of a patterned CMOS compatible catalyst for pre-defined regions of CVD graphene growth, and the transfer-free process used, allows the direct implementation of patterned graphene structures between the front-end-of-line (FEOL) and back-end-of-line (BEOL) processes. No significant deterioration of the graphene properties and of the CMOS logic gate performance due to the high temperature graphene growth step was observed. This is a significant leap towards industrial production of graphene-based smart MEMS/NEMS sensors.
|Title of host publication||2019 IEEE 32nd International Conference on Micro Electro Mechanical Systems (MEMS)|
|Place of Publication||Piscataway|
|Number of pages||4|
|Publication status||Published - 2019|
|Event||32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019 - Seoul, Korea, Republic of|
Duration: 27 Jan 2019 → 31 Jan 2019
|Conference||32nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2019|
|Country/Territory||Korea, Republic of|
|Period||27/01/19 → 31/01/19|
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