Original language | English |
---|---|
Pages (from-to) | 1365-1374 |
Number of pages | 10 |
Journal | IEEE Journal of Microelectromechanical Systems |
Volume | 21 |
Issue number | 6 |
Publication status | Published - 2012 |
Keywords
- CWTS 0.75 <= JFIS < 2.00
Original language | English |
---|---|
Pages (from-to) | 1365-1374 |
Number of pages | 10 |
Journal | IEEE Journal of Microelectromechanical Systems |
Volume | 21 |
Issue number | 6 |
Publication status | Published - 2012 |