Aberration correcting device for an electron microscope and an electron microscope comprising such a device

Pieter Kruit (Inventor)

    Research output: Patent

    Original languageEnglish
    IPCH01J
    Priority date22/07/16
    Publication statusPublished - 2018

    Bibliographical note

    Patent: OCT-15-061
    Applicant: Hitachi High-Technologies Corporation

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