Aberration retrieval for high-NA optical systems using the extended Nijboer-Zernike theory

P. Dirksen, JJM Braat, AJEM Janssen, A Leeuwenstein

Research output: Contribution to journalConference articleScientificpeer-review

16 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)262-274
Number of pages13
JournalProceedings of SPIE- International Society for Optical Engineering
Volume5754
Publication statusPublished - 2005

Keywords

  • conference contrib. refereed
  • Peer-lijst tijdschrift

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