Aberration retrieval for high-NA optical systems using the extended Nijboer-Zernike theory

P. Dirksen, JJM Braat, AJEM Janssen, A Leeuwenstein

Research output: Contribution to journal › Conference article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	262-274
Number of pages	13
Journal	Proceedings of SPIE- International Society for Optical Engineering
Volume	5754
Publication status	Published - 2005

Keywords

@article{62b3c3c2a6b942999631b208dfa99586,

title = "Aberration retrieval for high-NA optical systems using the extended Nijboer-Zernike theory",

keywords = "conference contrib. refereed, Peer-lijst tijdschrift",

author = "P. Dirksen and JJM Braat and AJEM Janssen and A Leeuwenstein",

year = "2005",

language = "Undefined/Unknown",

volume = "5754",

pages = "262--274",

journal = "Proceedings of SPIE- International Society for Optical Engineering",

issn = "0277-786X",

publisher = "SPIE",

}

TY - JOUR

T1 - Aberration retrieval for high-NA optical systems using the extended Nijboer-Zernike theory

AU - Dirksen, P.

AU - Braat, JJM

AU - Janssen, AJEM

AU - Leeuwenstein, A

PY - 2005

Y1 - 2005

KW - conference contrib. refereed

KW - Peer-lijst tijdschrift

M3 - Conference article

SN - 0277-786X

VL - 5754

SP - 262

EP - 274

JO - Proceedings of SPIE- International Society for Optical Engineering

JF - Proceedings of SPIE- International Society for Optical Engineering

ER -