Aberration retrieval using the extended Nijboer-Zernike approach

P. Dirksen, JJM Braat, AJEM Janssen, C. Juffermans

Research output: Contribution to journalArticleScientificpeer-review

43 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)61-68
Number of pages8
JournalJournal of Microlithography, Microfabrication, and Microsystems
Volume2
Issue number1
Publication statusPublished - 2003

Keywords

  • professional journal papers
  • Vakpubl., Overig wet. > 3 pag

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