Aberration retrieval using the extended Nijboer-Zernike approach

P. Dirksen, JJM Braat, AJEM Janssen, C. Juffermans

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	61-68
Number of pages	8
Journal	Journal of Microlithography, Microfabrication, and Microsystems
Volume	2
Issue number	1
Publication status	Published - 2003

Keywords

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title = "Aberration retrieval using the extended Nijboer-Zernike approach",

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T1 - Aberration retrieval using the extended Nijboer-Zernike approach

AU - Dirksen, P.

AU - Braat, JJM

AU - Janssen, AJEM

AU - Juffermans, C.

PY - 2003

Y1 - 2003

KW - professional journal papers

KW - Vakpubl., Overig wet. > 3 pag

M3 - Article

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VL - 2

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EP - 68

JO - Journal of Microlithography, Microfabrication, and Microsystems

JF - Journal of Microlithography, Microfabrication, and Microsystems

IS - 1

ER -