INIS
electrons
100%
design
100%
mirrors
100%
scanning electron microscopy
53%
voltage
46%
electrostatics
38%
size
30%
lenses
23%
symmetry
23%
optics
23%
time dependence
23%
relativistic range
23%
beams
23%
spherical aberrations
23%
perturbation theory
15%
magnetic fields
15%
trajectories
15%
dimensions
15%
bending
15%
configuration
15%
electron beams
15%
machining
7%
manufacturing
7%
semiconductor devices
7%
energy
7%
resolution
7%
units
7%
accounting
7%
metrology
7%
geometry
7%
optical properties
7%
incidents
7%
electrostatic mirrors
7%
comparative evaluations
7%
extreme ultraviolet radiation
7%
chromatic aberrations
7%
radiation effects
7%
cost
7%
tools
7%
corrections
7%
resist
7%
magnets
7%
Keyphrases
Relativistic Time
18%
Time-dependent Deflection
18%
Low-voltage SEM
18%
Deflection Theory
18%
Rank Combination
9%
Large-angle Deflection
9%
Precise Machining
9%
Deviation Coefficient
9%
LV-SEM
9%
Residual Deflection
9%
Energy Beam
9%