Accuracy analysis of the {FAUST} and {WAGNER} production process.

OW Fähnle, H van Brug

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

Original languageUndefined/Unknown
Title of host publicationOptical Manufacturing and Testing III.
EditorsPhilip H Stahl
PublisherSPIE
Pages181-192
Number of pages12
ISBN (Print)0-8194-3268-7
Publication statusPublished - 1999

Publication series

Name
PublisherSPIE
Name
Volume3782

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