Accurate read-out calibration of an SOI capacitive transducer using the pull-in voltage

L Mol, LA Rocha, E Cretu, RF Wolffenbuttel

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific

Original language	Undefined/Unknown
Title of host publication	Book of Abstracts - 18th Workshop on MicroMechanics Europe, MME 2007
Editors	s.n.
Place of Publication	s.l.
Publisher	MME
Pages	355-358
Number of pages	4
ISBN (Print)	978 972 98603 3 1
Publication status	Published - 2007
Event	18th Workshop on MicroMechanics Europe, MME 2007, Guimaraes, Portugal - s.l. Duration: 16 Sept 2007 → 18 Sept 2007

Name
Publisher	MME

Conference	18th Workshop on MicroMechanics Europe, MME 2007, Guimaraes, Portugal
Period	16/09/07 → 18/09/07

Keywords

@inproceedings{ec87383b82ef4ed89d774d89a2facee4,

title = "Accurate read-out calibration of an SOI capacitive transducer using the pull-in voltage",

keywords = "professional journal papers, Conf.proc. > 3 pag",

author = "L Mol and LA Rocha and E Cretu and RF Wolffenbuttel",

year = "2007",

language = "Undefined/Unknown",

isbn = "978 972 98603 3 1",

publisher = "MME",

pages = "355--358",

editor = "s.n.",

booktitle = "Book of Abstracts - 18th Workshop on MicroMechanics Europe, MME 2007",

note = "18th Workshop on MicroMechanics Europe, MME 2007, Guimaraes, Portugal ; Conference date: 16-09-2007 Through 18-09-2007",

}

TY - GEN

T1 - Accurate read-out calibration of an SOI capacitive transducer using the pull-in voltage

AU - Mol, L

AU - Rocha, LA

AU - Cretu, E

AU - Wolffenbuttel, RF

PY - 2007

Y1 - 2007

KW - professional journal papers

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 978 972 98603 3 1

SP - 355

EP - 358

BT - Book of Abstracts - 18th Workshop on MicroMechanics Europe, MME 2007

A2 - s.n., null

PB - MME

CY - s.l.

T2 - 18th Workshop on MicroMechanics Europe, MME 2007, Guimaraes, Portugal

Y2 - 16 September 2007 through 18 September 2007

ER -