Accurate SIMS doping profiling of aluminum-doped solid-phase epitaxy silicon islands

Y Civale, LK Nanver, SG Alberici, A Gammon, I Kelly

Research output: Contribution to journal › Article › Scientific › peer-review

Original language	Undefined/Unknown
Pages (from-to)	H74-H76
Journal	Electrochemical Society. Journal
Volume	11
Issue number	4
Publication status	Published - 2008

Keywords

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title = "Accurate SIMS doping profiling of aluminum-doped solid-phase epitaxy silicon islands",

keywords = "academic journal papers, CWTS 0.75 <= JFIS < 2.00",

author = "Y Civale and LK Nanver and SG Alberici and A Gammon and I Kelly",

year = "2008",

language = "Undefined/Unknown",

volume = "11",

pages = "H74--H76",

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issn = "0013-4651",

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}

TY - JOUR

T1 - Accurate SIMS doping profiling of aluminum-doped solid-phase epitaxy silicon islands

AU - Civale, Y

AU - Nanver, LK

AU - Alberici, SG

AU - Gammon, A

AU - Kelly, I

PY - 2008

Y1 - 2008

KW - academic journal papers

KW - CWTS 0.75 <= JFIS < 2.00

M3 - Article

SN - 0013-4651

VL - 11

SP - H74-H76

JO - Electrochemical Society. Journal

JF - Electrochemical Society. Journal

IS - 4

ER -