Accurate SIMS doping profiling of aluminum-doped solid-phase epitaxy silicon islands

Y Civale, LK Nanver, SG Alberici, A Gammon, I Kelly

Research output: Contribution to journalArticleScientificpeer-review

6 Citations (Scopus)
Original languageUndefined/Unknown
Pages (from-to)H74-H76
JournalElectrochemical Society. Journal
Volume11
Issue number4
Publication statusPublished - 2008

Keywords

  • academic journal papers
  • CWTS 0.75 <= JFIS < 2.00

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