Active feedback cooling of a SiN membrane resonator by electrostatic actuation

A. Borrielli, M. Bonaldi, E. Serra, P.M. Sarro, B. Morana

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Feedback-based control techniques are useful tools in precision measurements as they allow us to actively shape the mechanical response of high quality factor oscillators used in force detection measurements. In this paper, we implement a feedback technique on a high-stress low-loss SiN membrane resonator, exploiting the charges trapped on the dielectric membrane. A properly delayed feedback force (dissipative feedback) enables the narrowing of the thermomechanical displacement variance in a similar manner to the cooling of the normal mechanical mode down to an effective temperature Teff. In the experiment reported here, we started from room temperature and gradually increasing the feedback gain, we were able to cool down the first normal mode of the resonator to a minimum temperature of about 124mK. This limit is imposed by our experimental setup and, in particular, by the injection of the read-out noise into the feedback. We discuss the implementation details and possible improvements to the technique.

Original languageEnglish
Article number014502
Pages (from-to)014502-1 - 014502-11
Number of pages11
JournalJournal of Applied Physics
Issue number1
Publication statusPublished - 2021

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Green Open Access added to TU Delft Institutional Repository ‘You share, we take care!’ – Taverne project
Otherwise as indicated in the copyright section: the publisher is the copyright holder of this work and the author uses the Dutch legislation to make this work public.


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