Actuator for contactless transport and positioning of large flat substrates

J Wesselingh, RAJ van Ostayen, JW Spronck, RH Munnig Schmidt, J van Eijk

Research output: Chapter in Book/Conference proceedings/Edited volumeConference contributionScientific

10 Citations (Scopus)
Original languageUndefined/Unknown
Title of host publication10th anniversary international conference of the european society for precision engineering and nanotechnology
EditorsE. Brinksmeier H. Spaan H. van Brussel
Place of PublicationBedford
PublisherEuspen Headquaters
Pages145-149
Number of pages5
ISBN (Print)978-0-9553082-5-3
Publication statusPublished - 2008
Event10th anniversary international conference of the european society for precision engineering and nanotechnology - Bedford
Duration: 18 May 200822 May 2008

Publication series

Name
PublisherEuspen Headquaters
Name
Volume1

Conference

Conference10th anniversary international conference of the european society for precision engineering and nanotechnology
Period18/05/0822/05/08

Keywords

  • conference contrib. refereed
  • Conf.proc. > 3 pag

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