Adaptive Optics for EUV Lithography. Phase Retrieval for Wavefront Metrology

A Polo

Research output: ThesisDissertation (TU Delft)

Original languageEnglish
QualificationDoctor of Philosophy
Awarding Institution
  • Delft University of Technology
  • Urbach, H.P., Supervisor
  • Pereira, S.F., Advisor
  • Verhaegen, M.H.G., Advisor
  • Doelman, NJ, Advisor, External person
  • Goudail, F, Advisor, External person
  • Kneer, B, Advisor, External person
  • Gisolf, Dries, Advisor
Award date24 Feb 2014
Place of PublicationEnschede
Print ISBNs978-94-6259-061-8
Publication statusPublished - 2014


  • Diss. prom. aan TU Delft

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