Adaptive Optics for EUV Lithography. Phase Retrieval for Wavefront Metrology

A Polo

Research output: Thesis › Dissertation (TU Delft)

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Urbach, H.P., Supervisor Pereira, S.F., Advisor Verhaegen, M.H.G., Advisor Doelman, NJ, Advisor, External person Goudail, F, Advisor, External person Kneer, B, Advisor, External person Gisolf, Dries, Advisor
Award date	24 Feb 2014
Place of Publication	Enschede
Publisher	Ipskamp
Print ISBNs	978-94-6259-061-8
Publication status	Published - 2014

Keywords

@phdthesis{3a773379b7e34b7595b1f40aacbb5bdd,

title = "Adaptive Optics for EUV Lithography. Phase Retrieval for Wavefront Metrology",

keywords = "Diss. prom. aan TU Delft",

author = "A Polo",

year = "2014",

language = "English",

isbn = "978-94-6259-061-8",

publisher = "Ipskamp",

type = "Dissertation (TU Delft)",

school = "Delft University of Technology",

}