Adaptive Optics for EUV Lithography. Phase Retrieval for Wavefront Metrology

Research output: Thesis › Dissertation (TU Delft)

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Urbach, H.P., Promotor Pereira, S.F., Copromotor Verhaegen, Michel, Copromotor Doelman, NJ, Copromotor, External person Goudail, F, Copromotor, External person Kneer, B, Copromotor, External person Gisolf, Dries, Copromotor
Award date	24 Feb 2014
Place of Publication	Enschede
Publisher	Ipskamp
Print ISBNs	978-94-6259-061-8
Publication status	Published - 2014

Keywords

@phdthesis{3a773379b7e34b7595b1f40aacbb5bdd,

title = "Adaptive Optics for EUV Lithography. Phase Retrieval for Wavefront Metrology",

keywords = "Diss. prom. aan TU Delft",

author = "A Polo",

year = "2014",

language = "English",

isbn = "978-94-6259-061-8",

publisher = "Ipskamp",

type = "Dissertation (TU Delft)",

school = "Delft University of Technology",

}