Adaptive optics to counteract thermal aberrations: system design for EUV-lithography with sub-nm precision

Research output: Thesis › Dissertation (TU Delft)

Original language	English
Qualification	Doctor of Philosophy
Awarding Institution	Delft University of Technology
Supervisors/Advisors	Munnig Schmidt, Robert, Supervisor Spronck, J.W., Advisor
Award date	2 Dec 2013
Print ISBNs	978-94-6203-480-8
DOIs	https://doi.org/10.4233/uuid:1d71e3e8-88ce-4260-aeda-af0ee7675445
Publication status	Published - 2013

NEO

Keywords

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title = "Adaptive optics to counteract thermal aberrations: system design for EUV-lithography with sub-nm precision",

keywords = "Diss. prom. aan TU Delft",

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