Add-on process modules and economic enhancement for high-frequency silicon technology

JN Burghartz

Add-on process modules and economic enhancement for high-frequency silicon technology

JN Burghartz

Research output: Chapter in Book/Conference proceedings/Edited volume › Conference contribution › Scientific › peer-review

Original language	Undefined/Unknown
Title of host publication	Proceedings 2004 24th International Conference on Microelectronics (MIEL 2004)
Place of Publication	Piscataway
Publisher	IEEE Society
Pages	81-88
Number of pages	8
ISBN (Print)	0-7803-8166-1
Publication status	Published - 2004
Event	2004 24th International Conference on Microelectronics (MIEL 2004), Nis, Yugoslavia - Piscataway Duration: 16 May 2004 → 19 May 2004

Publication series

Name
Publisher	IEEE

Name
Volume	I

Conference

Conference	2004 24th International Conference on Microelectronics (MIEL 2004), Nis, Yugoslavia
Period	16/05/04 → 19/05/04

Bibliographical note

ed. is niet bekend

Keywords

Elektrotechniek
conference contrib. refereed
Conf.proc. > 3 pag

Cite this

@inproceedings{23a35b0c92664329b72f6ba5ac33b89a,

title = "Add-on process modules and economic enhancement for high-frequency silicon technology",

keywords = "Elektrotechniek, conference contrib. refereed, Conf.proc. > 3 pag",

author = "JN Burghartz",

note = "ed. is niet bekend; 2004 24th International Conference on Microelectronics (MIEL 2004), Nis, Yugoslavia ; Conference date: 16-05-2004 Through 19-05-2004",

year = "2004",

language = "Undefined/Unknown",

isbn = "0-7803-8166-1",

publisher = "IEEE Society",

pages = "81--88",

booktitle = "Proceedings 2004 24th International Conference on Microelectronics (MIEL 2004)",

}

TY - GEN

T1 - Add-on process modules and economic enhancement for high-frequency silicon technology

AU - Burghartz, JN

N1 - ed. is niet bekend

PY - 2004

Y1 - 2004

KW - Elektrotechniek

KW - conference contrib. refereed

KW - Conf.proc. > 3 pag

M3 - Conference contribution

SN - 0-7803-8166-1

SP - 81

EP - 88

BT - Proceedings 2004 24th International Conference on Microelectronics (MIEL 2004)

PB - IEEE Society

CY - Piscataway

T2 - 2004 24th International Conference on Microelectronics (MIEL 2004), Nis, Yugoslavia

Y2 - 16 May 2004 through 19 May 2004

ER -